DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오정석 | - |
dc.contributor.author | 이창우 | - |
dc.contributor.author | 이형석 | - |
dc.contributor.author | 김승우 | - |
dc.date.accessioned | 2013-03-15T00:23:17Z | - |
dc.date.available | 2013-03-15T00:23:17Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1993 | - |
dc.identifier.citation | 한국정밀공학회 1993년도 추계학술대회, v., no., pp.249 - 254 | - |
dc.identifier.uri | http://hdl.handle.net/10203/114967 | - |
dc.description.abstract | In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively. | - |
dc.language | KOR | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 초정밀 위치결정을 위한 이중서보제어용 미세구동 메카니즘 | - |
dc.title.alternative | A Fine Motion Mechanism of Dual Servo Control for Ultraprecision Positioning | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 249 | - |
dc.citation.endingpage | 254 | - |
dc.citation.publicationname | 한국정밀공학회 1993년도 추계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 오정석 | - |
dc.contributor.nonIdAuthor | 이창우 | - |
dc.contributor.nonIdAuthor | 이형석 | - |
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