미세패턴 측정을 위한 주사터널링현미경 원리의 응용An Application of Scanning Tunneling Microscopy for Measurement of Micro-Patterns

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Publisher
대한기계학회
Issue Date
1993
Language
KOR
Citation

대한기계학회 1993년 춘추학술대회, v.1, no.1, pp.771 - 774

URI
http://hdl.handle.net/10203/114940
Appears in Collection
ME-Conference Papers(학술회의논문)
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