초정밀 자기부상 위치 이동기구의 개발Development of a Magnetically Levitated Micro-Positioning Device

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Publisher
대한전자공학회
Issue Date
1994
Language
KOR
Citation

대한전자공학회 학술회의, v.1, pp.1411 - 1416

URI
http://hdl.handle.net/10203/114808
Appears in Collection
ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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