Buried Storage Capacitor under the Access Transistor(BUT) Cell for ULSI using Wafer Bonding Technology

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Issue Date
1991
Language
KOR
Citation

한국전자공학회, 한/미 마이크로일렉트로닉스 공동 워크샵

URI
http://hdl.handle.net/10203/113200
Appears in Collection
MS-Conference Papers(학술회의논문)
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