DSpace at KOASAS
College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Preparation and Characterization of SOG thin film for interdielectric layer and planarization

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 371
  • Download : 0
Export
Nam, CW / Woo, Seong-Ihlresearcher
Issue Date
1993
Language
ENG
Citation

3rd Industry/Academy Cooperation Research Seminar, Electronic Ceramics Research Center, pp.119 - 225

URI
http://hdl.handle.net/10203/112996
Appears in Collection
CBE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Full Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0