DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Chong-Ook | - |
dc.contributor.author | Park, HR | - |
dc.contributor.author | Yoon, SS | - |
dc.contributor.author | Chun, JS | - |
dc.date.accessioned | 2013-03-14T19:27:26Z | - |
dc.date.available | 2013-03-14T19:27:26Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1989 | - |
dc.identifier.citation | International Conference on Metallugical Coatings, American Vacuum Society, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/112387 | - |
dc.language | ENG | - |
dc.title | LPCVD of blanket W using a gaseous mixture of WF6, SiH4 and H2 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | International Conference on Metallugical Coatings, American Vacuum Society | - |
dc.contributor.localauthor | Park, Chong-Ook | - |
dc.contributor.nonIdAuthor | Park, HR | - |
dc.contributor.nonIdAuthor | Yoon, SS | - |
dc.contributor.nonIdAuthor | Chun, JS | - |
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