DC Field | Value | Language |
---|---|---|
dc.contributor.author | 천성순 | ko |
dc.date.accessioned | 2013-03-14T18:28:25Z | - |
dc.date.available | 2013-03-14T18:28:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1993-11 | - |
dc.identifier.citation | 한국재료학회 추계학술발표(Korean J. Mat. Sci.), pp.116 | - |
dc.identifier.uri | http://hdl.handle.net/10203/111829 | - |
dc.language | Korean | - |
dc.publisher | 한국재료학회 | - |
dc.title | The Effects of the Depoituon Variables on the Electrical Properties of the Ta2O5 Thin Films Deposited by ECR-PECVD | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 116 | - |
dc.citation.publicationname | 한국재료학회 추계학술발표(Korean J. Mat. Sci.) | - |
dc.identifier.conferencecountry | KO | - |
dc.identifier.conferencelocation | 연세대학교 | - |
dc.contributor.localauthor | 천성순 | - |
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