The Effects of the Depoituon Variables on the Electrical Properties of the Ta2O5 Thin Films Deposited by ECR-PECVD
- Publisher
- 한국재료학회
- Issue Date
- 1993-11
- Language
- Korean
- Citation
한국재료학회 추계학술발표(Korean J. Mat. Sci.), pp.116
- Appears in Collection
- RIMS Conference PapersRIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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