Surface Morphological Changes of PI with Oxygen Reactive Ion Beam Etching(RIBE)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Paik, Kyung-Wook | - |
| dc.date.accessioned | 2013-03-14T16:24:45Z | - |
| dc.date.available | 2013-03-14T16:24:45Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989-01-01 | - |
| dc.identifier.citation | Proc. Mat. Res. Soc. Symp, v., no., pp.495 - 500 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/110721 | - |
| dc.language | ENG | - |
| dc.title | Surface Morphological Changes of PI with Oxygen Reactive Ion Beam Etching(RIBE) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 495 | - |
| dc.citation.endingpage | 500 | - |
| dc.citation.publicationname | Proc. Mat. Res. Soc. Symp | - |
| dc.contributor.localauthor | Paik, Kyung-Wook | - |
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