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Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an environmentally stable chemically amplified resist Kim, Jin-Baek; Choi, JH; Kim, H; Kwon, YG; Jung, MH, POLYMER JOURNAL, v.31, no.9, pp.695 - 699, 1999 |
Synthesis of copolymers containing 3-hydroxycyclohexyl methacrylate and their application as ArF excimer laser resists Kim, Jin-Baek; Kim, JY; Jung, MH, POLYMER, v.40, no.1, pp.273 - 276, 1999-01 |
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