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Development of multiple inductively coupled plasma sources using coaxial transmission line for large-area processes Lee, Jin-Won; An, Sang-Hyuk; Kim, J. H.; Lee, Yun-Seong; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.16, no.3, pp.415 - 420, 2016-03 |
On the plasma uniformity of multi-electrode CCPs for large-area processing Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10 |
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