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Chemically amplified resists containing vinyllactam derivatives Kim, Jin-Baek; Jung, M.-H.; Cheong, J.-H.; Kim, J.-Y.; Bok, C.-K.; Koh, C.-W.; Baik, K.-H., JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.10, no.3, pp.493 - 502, 1997 |
Postexposure delay effect in chemically amplified resists Kim, Jin-Baek; Kwon, Y.-G.; Yun, H.-J.; Jung, M.-H., JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.14, no.3, pp.401 - 406, 2001 |
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