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Novel top-surface imaging process by selective chemisorption of poly(dimethyl siloxane) on diazoketo-functionalized single component photoresist Ganesana, Ramakrishnan; Youna, Seul-Ki; Kim, Jin-Baek, MACROMOLECULAR RAPID COMMUNICATIONS, v.29, no.5, pp.437 - 441, 2008-03 |
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