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Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists Kim, ST; Kim, Jin-Baek; Jung, MH; Ahn, KD, POLYMER BULLETIN, v.39, no.4, pp.423 - 430, 1997 |
Polymerization of N-(tert-butyldimethylsilyloxy)maleimide and applications of the polymers as resist materials Kim, ST; Kim, Jin-Baek; Chung, CM; Ahn, KD, JOURNAL OF APPLIED POLYMER SCIENCE, v.66, no.13, pp.2507 - 2516, 1997 |
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