Effects of Nitrogen Flow Rate on the Structure and Properties of Reactively Sputtered TiNx Films

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dc.contributor.authorKwon, Hyuk-Sang-
dc.date.accessioned2013-03-14T14:26:56Z-
dc.date.available2013-03-14T14:26:56Z-
dc.date.created2012-02-06-
dc.date.issued1989-
dc.identifier.citationProc. of 3rd Asian Surface Finishing Forum,Seoul,Korea, v., no., pp.229 - 236-
dc.identifier.urihttp://hdl.handle.net/10203/109682-
dc.languageENG-
dc.titleEffects of Nitrogen Flow Rate on the Structure and Properties of Reactively Sputtered TiNx Films-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage229-
dc.citation.endingpage236-
dc.citation.publicationnameProc. of 3rd Asian Surface Finishing Forum,Seoul,Korea-
dc.contributor.localauthorKwon, Hyuk-Sang-
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MS-Conference Papers(학술회의논문)
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