Effects of Nitrogen Flow Rate on the Structure and Properties of Reactively Sputtered TiNx Films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kwon, Hyuk-Sang | - |
| dc.date.accessioned | 2013-03-14T14:26:56Z | - |
| dc.date.available | 2013-03-14T14:26:56Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989 | - |
| dc.identifier.citation | Proc. of 3rd Asian Surface Finishing Forum,Seoul,Korea, v., no., pp.229 - 236 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/109682 | - |
| dc.language | ENG | - |
| dc.title | Effects of Nitrogen Flow Rate on the Structure and Properties of Reactively Sputtered TiNx Films | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 229 | - |
| dc.citation.endingpage | 236 | - |
| dc.citation.publicationname | Proc. of 3rd Asian Surface Finishing Forum,Seoul,Korea | - |
| dc.contributor.localauthor | Kwon, Hyuk-Sang | - |
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