A Transmission Electron Microscopy Study on the Incubation Time of the Low-Pressure Chemical Vapor Deposited Silicon Thin Films of 9SiO2
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이정용 | ko |
| dc.date.accessioned | 2013-03-14T11:45:25Z | - |
| dc.date.available | 2013-03-14T11:45:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994-11 | - |
| dc.identifier.citation | 한국현미경학회 제 25 회 추계학술대회, pp.237 - 253 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/108336 | - |
| dc.language | Korean | - |
| dc.publisher | 한국현미경학회 | - |
| dc.title | A Transmission Electron Microscopy Study on the Incubation Time of the Low-Pressure Chemical Vapor Deposited Silicon Thin Films of 9SiO2 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 237 | - |
| dc.citation.endingpage | 253 | - |
| dc.citation.publicationname | 한국현미경학회 제 25 회 추계학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | 이정용 | - |
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