DSpace at KOASAS: Studies on the Microvoids at the Interface of Direct Bonded Silicon Wafers

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Studies on the Microvoids at the Interface of Direct Bonded Silicon Wafers

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Sang-Won Kang researcher

Issue Date: 1991

Language: ENG

Citation: ESC Proc. of the 1st Interanational Conf. on Semiconductor Wafer Bonding, Science, Technology and Application, pp.102 -

URI: http://hdl.handle.net/10203/107605

Appears in Collection: MS-Conference Papers(학술회의논문)

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