DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chun , Soung Soon | ko |
dc.date.accessioned | 2013-03-14T07:38:02Z | - |
dc.date.available | 2013-03-14T07:38:02Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1983-05 | - |
dc.identifier.citation | Proc. EURO CVD 4, Chemical Vapor Deposition, pp.401 | - |
dc.identifier.uri | http://hdl.handle.net/10203/106608 | - |
dc.language | English | - |
dc.publisher | European Conference on Chemical Vapour Deposition | - |
dc.title | The Effects of Reaction Parameters on the Deposition Characteristics in Al2O3 CVD | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 401 | - |
dc.citation.publicationname | Proc. EURO CVD 4, Chemical Vapor Deposition | - |
dc.identifier.conferencecountry | NE | - |
dc.identifier.conferencelocation | Eindhoven | - |
dc.contributor.localauthor | Chun , Soung Soon | - |
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