The Effects of Reaction Parameters on the Deposition Characteristics in Al2O3 CVD

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Publisher
European Conference on Chemical Vapour Deposition
Issue Date
1983-05
Language
English
Citation

Proc. EURO CVD 4, Chemical Vapor Deposition, pp.401

URI
http://hdl.handle.net/10203/106608
Appears in Collection
RIMS Conference PapersRIMS Conference Papers
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