DSpace at KOASAS: ECR plasma oxidation effects on performance and stability of polysilicon thin film transistors

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

ECR plasma oxidation effects on performance and stability of polysilicon thin film transistors

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Lee Jung-Yeal / Han Chul-Hi researcher / Kim, Choong Ki

Issue Date: 1994-12-11

Language: ENG

Citation: Proceedings of the 1994 IEEE International Electron Devices Meeting, pp.523 - 526

ISSN: 0163-1918

URI: http://hdl.handle.net/10203/105958

Appears in Collection: EE-Conference Papers(학술회의논문)

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