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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

ECR-PECVD 방법에 의한 탄탈륨 산화 박막에 증착 온도 및 열처리 온도가 미치는 영향

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이원종researcher
Issue Date
1993-01-01
Language
KOR
Citation

한국요업학회 1993 추계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/105747
Appears in Collection
MS-Conference Papers(학술회의논문)
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