Active Compensation of Movement Errors of a Machine Axis by Multiple Null-Balancing using Twyman-Green Interferometry

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorLee ,H.S.-
dc.date.accessioned2013-03-14T05:00:03Z-
dc.date.available2013-03-14T05:00:03Z-
dc.date.created2012-02-06-
dc.date.issued1994-
dc.identifier.citationProc. of the 3rd international Workshop on Advanced Motion Control, v., no., pp.689 - 698-
dc.identifier.urihttp://hdl.handle.net/10203/105500-
dc.languageENG-
dc.titleActive Compensation of Movement Errors of a Machine Axis by Multiple Null-Balancing using Twyman-Green Interferometry-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage689-
dc.citation.endingpage698-
dc.citation.publicationnameProc. of the 3rd international Workshop on Advanced Motion Control-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorLee ,H.S.-
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ME-Conference Papers(학술회의논문)
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