DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, JT | - |
dc.contributor.author | Kim, NY | - |
dc.contributor.author | Park, HK | - |
dc.contributor.author | Woo, Seong-Ihl | - |
dc.date.accessioned | 2013-03-14T04:29:33Z | - |
dc.date.available | 2013-03-14T04:29:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1993 | - |
dc.identifier.citation | 3rd IUMRS Conference Symposium S, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/105265 | - |
dc.language | ENG | - |
dc.publisher | IUMRS | - |
dc.title | Characteristics of silylation and wet develop in Novolac/Diazonaphthoquinone resist | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 3rd IUMRS Conference Symposium S | - |
dc.identifier.conferencecountry | Japan | - |
dc.identifier.conferencecountry | Japan | - |
dc.contributor.localauthor | Woo, Seong-Ihl | - |
dc.contributor.nonIdAuthor | Kim, JT | - |
dc.contributor.nonIdAuthor | Kim, NY | - |
dc.contributor.nonIdAuthor | Park, HK | - |
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