Fabrication of various cross-sectional shaped polymer microchannels by a simple PDMS mold based stamping method

Cited 8 time in webofscience Cited 0 time in scopus
  • Hit : 214
  • Download : 0
We describe a facile and simple stamping method to fabricate various cross-sectional shaped microfluidic channels in transparent polymer materials such as polydimethylsiloxane (PDMS), poly(methylmethacrylate) (PMMA), polystyrene (PS), and cyclic olefin copolymer (COC). First, microchannels of circular, rectangular, and triangular shape and different size were fabricated on a silicon wafer through an isotropic or anisotropic wet etching process, and the resultant microchannels on silicon wafers were transferred to PDMS through a replication technique. The produced PDMS with replicated convex microchannels served as a master mold. A variety of polymer solutions were pressed down against the PDMS master mold, and cured until the solvent was evaporated, generating circular, rectangular, and triangular shaped PDMS, PMMA, PS, and COC microchannels. The microchannels could be repeatedly prepared with a narrow standard deviation, thus demonstrating high reproducibility of the proposed method. The microchannel dimensions, shape, and surface roughness could be controlled by tuning the channel width of the mask, the wet etching direction, the etchant solution, and the concentration of KOH, respectively, when the microchannels were fabricated on a silicon wafer. This simple but efficient PDMS mold based stamping method can be widely used for fabricating different shaped microchannels on diverse polymer materials with high reproducibility, low cost, and high speed.
Publisher
KOREAN BIOCHIP SOCIETY-KBCS
Issue Date
2012-09
Language
English
Article Type
Article
Keywords

SILICON; SYSTEM; H2O; KOH

Citation

BIOCHIP JOURNAL, v.6, no.3, pp.240 - 246

ISSN
1976-0280
DOI
10.1007/s13206-012-6306-1
URI
http://hdl.handle.net/10203/104382
Appears in Collection
CBE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 8 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0