DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Su Min | ko |
dc.contributor.author | Ku, Se Jin | ko |
dc.contributor.author | Jo, Gyeong Cheon | ko |
dc.contributor.author | Bak, Chang Hong | ko |
dc.contributor.author | Kim, Jin-Baek | ko |
dc.date.accessioned | 2013-03-12T18:50:53Z | - |
dc.date.available | 2013-03-12T18:50:53Z | - |
dc.date.created | 2012-08-08 | - |
dc.date.created | 2012-08-08 | - |
dc.date.issued | 2012-05 | - |
dc.identifier.citation | POLYMER, v.53, no.11, pp.2283 - 2289 | - |
dc.identifier.issn | 0032-3861 | - |
dc.identifier.uri | http://hdl.handle.net/10203/103191 | - |
dc.description.abstract | We report a new approach to fabricate versatile nanoporous templates with high aspect ratios by incorporating silicon-containing block copolymers into the lithographic bilayer system. This approach used a top thin film of self-assembled asymmetric polystyrene-block-poly(4-(tert-butyldimethylsilyl) oxystyrene) (PS-b-PSSi) as a hard etch mask and an underlying thick film of a negative-tone photoresist (SU-8) for pattern transfer. The assembly of PS-b-PSSi was well-controlled by solvent annealing on the SU-8 and deep nanopores were formed in the underlying layer by oxygen reactive ion etching due to high etch contrast. As a result, highly dense and uniform nanoporous templates with high aspect ratios were obtained over a large area. These templates have versatilities to easily control the sizes of nanopores and to make on the diverse functional substrates. Moreover, the dry-etch process during removal of nanotemplates prevented collapse and aggregation of nanostructures. As a demonstration, we fabricated vertically ordered freestanding gold nanorod arrays by using these templates. (C) 2012 Elsevier Ltd. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCI LTD | - |
dc.subject | FREESTANDING NANOROD ARRAYS | - |
dc.subject | SOLAR-CELLS | - |
dc.subject | TITANIA NANOTUBES | - |
dc.subject | NANOWIRE ARRAYS | - |
dc.subject | THIN-FILMS | - |
dc.subject | SURFACE | - |
dc.subject | ALUMINA | - |
dc.title | Fabrication of versatile nanoporous templates with high aspect ratios by incorporation of Si-containing block copolymer into the lithographic bilayer system | - |
dc.type | Article | - |
dc.identifier.wosid | 000304630200020 | - |
dc.identifier.scopusid | 2-s2.0-84860268804 | - |
dc.type.rims | ART | - |
dc.citation.volume | 53 | - |
dc.citation.issue | 11 | - |
dc.citation.beginningpage | 2283 | - |
dc.citation.endingpage | 2289 | - |
dc.citation.publicationname | POLYMER | - |
dc.identifier.doi | 10.1016/j.polymer.2012.03.006 | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Hard etch mask | - |
dc.subject.keywordAuthor | Nanoporous template | - |
dc.subject.keywordAuthor | Silicon-containing block copolymer | - |
dc.subject.keywordPlus | FREESTANDING NANOROD ARRAYS | - |
dc.subject.keywordPlus | SOLAR-CELLS | - |
dc.subject.keywordPlus | TITANIA NANOTUBES | - |
dc.subject.keywordPlus | NANOWIRE ARRAYS | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | SURFACE | - |
dc.subject.keywordPlus | ALUMINA | - |
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