Measurements of Electron Energy Probability Functions in inductively coupled plasma with laser Thomson scattering

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Electron energy probability functions (EEPFs) having a fine resolution of electron energy were measured in low-pressure inductively coupled plasma with laser Thomson scattering method (LTS) at various plasma conditions (rf powers and gas pressures) and compared with the EEPFs measured by a single Langmuir probe (SLP) at the same experimental conditions. The result of LTS showed that the measured electron density normally increases with the rf power and the gas pressure, and the electron temperature decreased with the rf power and the gas pressure. This result have a good agreement not only with the previous reports qualitatively but also with our SLP measurement result quantitatively [15]. The reasons for the discrepancy between two methods in absolute value might be expected to these facts as following: the probe perturbation effect from the probe holder volume, RF noise, and not sufficient signal level of laser Thomson scattering.
Publisher
IOP PUBLISHING LTD
Issue Date
2012-01
Language
English
Article Type
Article
Keywords

MEASUREMENT SYSTEM; DISCHARGE PLASMA; LANGMUIR PROBE; RF DISCHARGE; TEMPERATURE; DISTRIBUTIONS; DIAGNOSTICS; DENSITY

Citation

JOURNAL OF INSTRUMENTATION, v.7

ISSN
1748-0221
DOI
10.1088/1748-0221/7/01/C01049
URI
http://hdl.handle.net/10203/103175
Appears in Collection
PH-Journal Papers(저널논문)
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