DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jungchul | ko |
dc.contributor.author | Lee, Bong Jae | ko |
dc.contributor.author | King, William P. | ko |
dc.date.accessioned | 2013-03-12T17:48:22Z | - |
dc.date.available | 2013-03-12T17:48:22Z | - |
dc.date.created | 2012-07-26 | - |
dc.date.created | 2012-07-26 | - |
dc.date.created | 2012-07-26 | - |
dc.date.issued | 2012-08 | - |
dc.identifier.citation | IEEE SENSORS JOURNAL, v.12, no.8, pp.2666 - 2667 | - |
dc.identifier.issn | 1530-437X | - |
dc.identifier.uri | http://hdl.handle.net/10203/103062 | - |
dc.description.abstract | We report a technique to calibrate the sensitivity of sensor-integrated atomic force microscope cantilevers using pseudo-gratings. An offset signal superposed onto the cantilever control signal modulates the cantilever position over a flat surface, driving the cantilever toward and away from the surface in a controlled way. The relationship between the cantilever sensor signal and displacement provides the cantilever calibration. We show how this technique can be used to calibrate heated micro-cantilever sensors. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | ATOMIC-FORCE MICROSCOPE | - |
dc.title | Deflection Sensitivity Calibration of Heated Microcantilevers Using Pseudo-Gratings | - |
dc.type | Article | - |
dc.identifier.wosid | 000305584300006 | - |
dc.identifier.scopusid | 2-s2.0-84862576874 | - |
dc.type.rims | ART | - |
dc.citation.volume | 12 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 2666 | - |
dc.citation.endingpage | 2667 | - |
dc.citation.publicationname | IEEE SENSORS JOURNAL | - |
dc.identifier.doi | 10.1109/JSEN.2012.2200971 | - |
dc.contributor.localauthor | Lee, Jungchul | - |
dc.contributor.localauthor | Lee, Bong Jae | - |
dc.contributor.nonIdAuthor | King, William P. | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | heated microcantilever | - |
dc.subject.keywordAuthor | Atomic force microscopy | - |
dc.subject.keywordAuthor | calibration | - |
dc.subject.keywordAuthor | deflection sensitivity | - |
dc.subject.keywordPlus | ATOMIC-FORCE MICROSCOPE | - |
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