A study on the effect of ultrasonic vibration in nanosecond laser machining

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Laser machining has been used in various industrial manufacturing fields. However the surface finish of a machined surface becomes degraded by the recast layer that is created by the agglomeration of nanoparticles re-deposited on a work surface. In this study, ultrasonic vibration was applied to a nanosecond laser machining process in order to improve the quality of machined surface. A resonance type ultrasonic vibration module was designed to realize a unidirectional motion. To investigate the effects of ultrasonic vibration on the work surface, the morphological change of particles re-deposited on the machined area was observed in various process conditions. The results showed that the surface finish was improved by the near-field surface cooling enhancement induced by ultrasonic vibration. And it was found that such a vibration effect was remarkable in a repetitive machining process. From the chemical composition analysis of a machined surface, it was verified that the vibration can prevent the surface oxidation and the formation of recast layer. As a result, the ultrasonic vibration in ns-laser machining process was effective for improving both the physical and chemical quality of a machined surface. (C) 2012 Elsevier Ltd. All rights reserved.
Publisher
ELSEVIER SCI LTD
Issue Date
2012-12
Language
English
Article Type
Article
Keywords

INDUCED DAMAGE; NANOPARTICLE; FEMTOSECOND; ABLATION; TEMPERATURE; FABRICATION; DIELECTRICS; PICOSECOND; REDUCTION; PARTICLES

Citation

OPTICS AND LASERS IN ENGINEERING, v.50, no.12, pp.1817 - 1822

ISSN
0143-8166
DOI
10.1016/j.optlaseng.2012.06.013
URI
http://hdl.handle.net/10203/102716
Appears in Collection
ME-Journal Papers(저널논문)
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