Design of patterned leaf spring for sensor-probe with stable reflectivity and high sensitivity

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In sensors, integrated reflection mechanisms of the illuminating light to the reflection material on the proof mass require a strict single degree of motion because the accuracy almost entirely depends on the motion of the proof mass. Therefore, this paper describes the optimum design of a mass-spring structure that features high sensitivity and long linear elastic motion range of the leaf spring without rotation and lateral motion of the proof mass. Accordingly, finite element analyses were conducted to determine an optimal leaf spring pattern and to predict the probe performance. The optimum design of the leaf spring was determined by considering five criteria within the linear elastic region of the eight leaf spring models. Then, two types of leaf springs were manufactured, and the proposed mass-spring system integrated to the prototype was fabricated. The reliability of the FEA results and the performance of the fabricated mass-spring model were verified through the force-displacement curve test, the dynamic test, and the rotation test.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2012-04
Language
English
Article Type
Article
Keywords

FIBER-OPTIC ACCELEROMETER; COMPLIANT CYLINDER

Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.176, pp.19 - 26

ISSN
0924-4247
DOI
10.1016/j.sna.2011.12.048
URI
http://hdl.handle.net/10203/102713
Appears in Collection
AE-Journal Papers(저널논문)
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