Theoretical investigations on multiple-reflection and Rayleigh absorption-emission-scattering effects in laser drilling

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dc.contributor.authorPark, Kwan-Wooko
dc.contributor.authorNa, Suck-Jooko
dc.date.accessioned2013-03-11T20:47:22Z-
dc.date.available2013-03-11T20:47:22Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-02-
dc.identifier.citationAPPLIED SURFACE SCIENCE, v.256, no.8, pp.2392 - 2399-
dc.identifier.issn0169-4332-
dc.identifier.urihttp://hdl.handle.net/10203/100235-
dc.description.abstractA fundamental study of laser drilling was performed with computational analysis. High power Q-switched diode-pumped laser drilling simulations were conducted on N-type silicon wafers. In the numerical model, the volume of fluid method was adopted to trace the free surface of the drilled-hole with the governing equations including continuity, momentum, and energy equation. The laser beam was considered as a surface heat flux with near-Gaussian distribution. The simulation model took into account the physical phenomena, taking place during drilling of the silicon wafer, such as the effects of recoil pressure producing a narrow and deep profile, Fresnel absorption transferring the energy from laser beam to workpiece, multiple-reflection raising the absorption of laser energy, and Rayleigh absorption-emission-scattering absorbing and distributing the entrance laser energy. In particular, a novel model for laser drilling was proposed from the view point of the transmitted, absorbed, emitted, and scattered light. (C) 2009 Elsevier B. V. All rights reserved.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.subjectSILICON-
dc.subjectABLATION-
dc.subjectPLASMA-
dc.subjectDYNAMICS-
dc.subjectND-
dc.titleTheoretical investigations on multiple-reflection and Rayleigh absorption-emission-scattering effects in laser drilling-
dc.typeArticle-
dc.identifier.wosid000273670700017-
dc.identifier.scopusid2-s2.0-74149087016-
dc.type.rimsART-
dc.citation.volume256-
dc.citation.issue8-
dc.citation.beginningpage2392-
dc.citation.endingpage2399-
dc.citation.publicationnameAPPLIED SURFACE SCIENCE-
dc.identifier.doi10.1016/j.apsusc.2009.10.073-
dc.contributor.localauthorNa, Suck-Joo-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorLaser drilling-
dc.subject.keywordAuthorAblation plume-
dc.subject.keywordAuthorMultiple-reflection-
dc.subject.keywordAuthorRayleigh scattering-
dc.subject.keywordPlusSILICON-
dc.subject.keywordPlusABLATION-
dc.subject.keywordPlusPLASMA-
dc.subject.keywordPlusDYNAMICS-
dc.subject.keywordPlusND-
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