DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Kwan-Woo | ko |
dc.contributor.author | Na, Suck-Joo | ko |
dc.date.accessioned | 2013-03-11T20:47:22Z | - |
dc.date.available | 2013-03-11T20:47:22Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-02 | - |
dc.identifier.citation | APPLIED SURFACE SCIENCE, v.256, no.8, pp.2392 - 2399 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://hdl.handle.net/10203/100235 | - |
dc.description.abstract | A fundamental study of laser drilling was performed with computational analysis. High power Q-switched diode-pumped laser drilling simulations were conducted on N-type silicon wafers. In the numerical model, the volume of fluid method was adopted to trace the free surface of the drilled-hole with the governing equations including continuity, momentum, and energy equation. The laser beam was considered as a surface heat flux with near-Gaussian distribution. The simulation model took into account the physical phenomena, taking place during drilling of the silicon wafer, such as the effects of recoil pressure producing a narrow and deep profile, Fresnel absorption transferring the energy from laser beam to workpiece, multiple-reflection raising the absorption of laser energy, and Rayleigh absorption-emission-scattering absorbing and distributing the entrance laser energy. In particular, a novel model for laser drilling was proposed from the view point of the transmitted, absorbed, emitted, and scattered light. (C) 2009 Elsevier B. V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | SILICON | - |
dc.subject | ABLATION | - |
dc.subject | PLASMA | - |
dc.subject | DYNAMICS | - |
dc.subject | ND | - |
dc.title | Theoretical investigations on multiple-reflection and Rayleigh absorption-emission-scattering effects in laser drilling | - |
dc.type | Article | - |
dc.identifier.wosid | 000273670700017 | - |
dc.identifier.scopusid | 2-s2.0-74149087016 | - |
dc.type.rims | ART | - |
dc.citation.volume | 256 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 2392 | - |
dc.citation.endingpage | 2399 | - |
dc.citation.publicationname | APPLIED SURFACE SCIENCE | - |
dc.identifier.doi | 10.1016/j.apsusc.2009.10.073 | - |
dc.contributor.localauthor | Na, Suck-Joo | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Laser drilling | - |
dc.subject.keywordAuthor | Ablation plume | - |
dc.subject.keywordAuthor | Multiple-reflection | - |
dc.subject.keywordAuthor | Rayleigh scattering | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | ABLATION | - |
dc.subject.keywordPlus | PLASMA | - |
dc.subject.keywordPlus | DYNAMICS | - |
dc.subject.keywordPlus | ND | - |
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