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A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma

Park, Min; Chang, Hong-Youngresearcher; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon, THIN SOLID FILMS, v.518, pp.6694 - 6699, 2010-09

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