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DC reactive sputtering법을 이용한 $RuO_x$ 하부전극 형성과 고유전 $(Ba,Sr)TiO_3$ 박막의 특성 평가에 관한 연구 = Preparation of $RuO_x$ bottom electrode by DC reactive sputtering and characterization of $(Ba,Sr)TiO_3$ thin filmslink 안준형; Ahn, Joon-Hyung; et al, 한국과학기술원, 1998 |
Effects of the Interfacial Layers on the Time-Dependent Leakage Current Characteristics of(Ba,Sr)TiO3 Thin Films J.H. Ahn; W.J. Lee; Kim, Ho Gi, JAPANESE JOURNAL OF APPLIED PHYSICS, v.37, no.12A, pp.6472 - 6475, 1998-12 |
Superlattice formation of (Ba,Sr)TiO3 prepared by metal-organic chemical vapor deposition Yoo, DC; Lee, JeongYong, MATERIALS LETTERS, v.47, no.4-5, pp.258 - 261, 2001-02 |
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