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Showing results 1 to 2 of 2

1
Characterization and removal of trace heavy metal contamination on Si-surface resulted from CHF3/C2F6 reactive ion etching

Lee, Chun Su; Kang, Seung Yul; Woo, Seong-Ihl; Baek, Jong Tae; Yoo, Hyung Joun, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.4A, pp.2096 - 2100, 1997-04

2
Versatile fabrication of functional nanostructures using patterning processes and their apprications = 다양한 패터닝 공정을 이용한 기능성 나노구조 제작과 그 응용에 관한 연구link

Jo, Gyeong Cheon; 조경천; et al, 한국과학기술원, 2016

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