Showing results 1 to 1 of 1
Etching behavior and damage recovery of SrBi2Ta2O9 thin films Lee, WJ; Cho, CR; Kim, SH; You, IK; Kim, BW; Yu, BG; Shin, CH; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.38, no.12A, pp.1428 - 1431, 1999-12 |
Discover