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Poly(t-butyl-3 alpha-(5-norbomene-2-carbonyloxy)-7 alpha,12 alpha-dihydroxy-5 beta-cholan-24-oate-co-maleic anhydride) for a 193-nm photoresist Kim, Jin-Baek; Lee, BW; Kang, JS; Seo, DC; Roh, CH, POLYMER, v.40, no.26, pp.7423 - 7426, 1999-12 |
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