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Molybdenum gate technology for ultrathin-body MOSFETs and FinFETs Ha, D; Takeuchi, H; Choi, Yang-Kyu; King, TJ, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.51, no.12, pp.1989 - 1996, 2004-12 |
유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구 = A study on the etching characteristics of PZT films using Inductively coupled Plasmalink 정진기; Jung, Jin-Ki; et al, 한국과학기술원, 2001 |
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