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Layout Pattern Synthesis for Lithography Optimizations Kareem, Pervaiz; Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.2, pp.283 - 290, 2020-05 |
Light Interference Map: A Prescriptive Optimization of Lithography-Friendly Layout Shim, Seongbo; Choi, Suhyeong; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.29, no.1, pp.44 - 49, 2016-02 |
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