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SUPPRESSION OF LEAKAGE CURRENT IN N-CHANNEL POLYSILICON THIN-FILM TRANSISTORS USING NH3 ANNEALING

CHOI, DS; HUR, SH; YANG, GY; Han, Chul-Hi; Kim, Choong Ki, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.34, no.2B, pp.882 - 885, 1995-02

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