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Effect of oxygen plasma treatment on hydrogen-damaged Pt/Pb(ZrxTi1-x)O-3/Pt ferroelectric thin-film capacitor young-soo park; june key lee; ilsub chung; Lee, Jai Young, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.38, no.5B, pp.L577 - L579, 1999 |
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