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Showing results 1 to 2 of 2

1
Deposition and 1.54 mu m Er3+ luminescent properties of erbium-doped hydrogenated amorphous silicon thin films by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiH4 with concurrent sputtering of erbium

Shin, JungHoonresearcher; Kim, MJ, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.17, no.6, pp.3230 - 3234, 1999

2
Effect of the target power density on the synthesis and physical properties of sputtered nc-C films

Myung, HS; Park, YS; Hong, B; Han, JG; Kim, YH; Lee, JeongYongresearcher; Shaginyan, LR, THIN SOLID FILMS, v.494, pp.123 - 127, 2006-01

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