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Hydrizoalane 의 합성 및 단일 전구체 OMCVD 법에 의한 AlN 박막의 제조 = Synthesis of hydrizoalanes and preparation of AlN thin films by single-precursor OMCVDlink

김재환; Kim, Jae-Hwan; et al, 한국과학기술원, 1996

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