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Fabrication of three-dimensional nanostructures within microfluidic chips by prism holographic lithography = 프리즘 홀로그래피 식각공정을 이용한 미세유체소자 내부에서의 3차원 나노구조의 제조link

Park, Sung-Gyu; 박성규; et al, 한국과학기술원, 2010

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