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The Influence of the Acoustic Reflector Design on the Temperature Coefficient of Frequency for Shear and Longitudinal Mode AlN Resonators

Munir, Junaid; DeMiguel-Ramos, Mario; Lee, Hyunjoo Jenny; Saeed, Mohammad Alam; Iborra, Enrique, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.26, no.6, pp.1306 - 1315, 2017-12

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