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Intrinsic Thermomechanical Properties of Freestanding TEOS-SiO2 Thin Films Depending on Thickness Kim, Hyeongjun; Kim, Dong Jun; Kim, Joon Pyo; Baek, Woo Jin; Kim, Sanghyeon; Kim, Taek-Soo, ACS APPLIED ELECTRONIC MATERIALS, v.6, no.7, pp.5293 - 5300, 2024-07 |
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