Browse by Subject X-ray mask
Showing results 1 to 3 of 3
| Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.111, no.1, pp.37 - 43, 2004 |
| Electron beam damage in the SiN membrane of an X-ray lithography mask Choi, Sang-Soo; Kim, Jong Soo; Chung, Hai Bin; Yoo, Hyung Joun; Kim, Bo-Woo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.1, pp.360 - 363, 1998-01 |
| 제조공정과 사용조건을 고려한 X-선 마스크의 변형해석 = Analysis of structural distortions of an X-ray mask considering fabrication processes and writing conditionslink 김일용; Kim, Il-Yong; et al, 한국과학기술원, 1997 |
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