Browse by Subject Ultrasound▼aUltrasound imaging▼aCapacitive Micromachined Ultrasonic Transducer (CMUT)▼aTransparency▼aFlexibility▼aPolymer-based fabrication▼aWafer-scale fabrication
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| Development of MEMS fabrication for transparent and flexible capacitive micromachined ultrasonic transducer (CMUT) = 투명하고 유연한 정전용량형 미세가공 초음파 트랜스듀서 (CMUT)의 MEMS 공정 개발link Kang, ByungBum; Lee, Hyunjoo Jenny; et al, 한국과학기술원, 2020 |
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