Browse by Subject Self-aligned double patterning (SADP)▼aunidirectional layout▼awire widening▼awire width optimization▼aredundant via insertion▼aintegrated routing and dummy fill
Showing results 1 to 1 of 1
| Layout design and optimization for self-aligned double patterning process = 자기 정렬 이중 패터닝 공정을 위한 레이아웃 디자인 및 최적화link Song, Youngsoo; Shin, Youngsoo; et al, 한국과학기술원, 2019 |
Discover
Type
Open Access
Date issued
- 34,238 2020 - 2024
- 100,102 2010 - 2019
- 75,680 2000 - 2009
- 44,727 1990 - 1999
- 14,360 1980 - 1989
- 62 1964 - 1969