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The characteristics of the multi-hole RF capacitively coupled plasma discharged with neon, argon and krypton Lee, H. S.; Lee, Yun-Seong; Seo, S. H.; Chang, Hong-Young, THIN SOLID FILMS, v.519, pp.6955 - 6959, 2011-08 |
The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma Lee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.289 - 292, 2013-11 |
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