Browse by Subject LINE EDGE ROUGHNESS

Showing results 1 to 3 of 3

1
Eliminating the Trade-Off between the Throughput and Pattern Quality of Sub-15 nm Directed Self-Assembly via Warm Solvent Annealing

Kim, Jong Min; Kim, YongJoo; Park, Woon Ik; Hur, Yoon Hyung; Jeong, Jae Won; Sim, Dong Min; Baek, Kwang Min; et al, ADVANCED FUNCTIONAL MATERIALS, v.25, no.2, pp.306 - 315, 2015-01

2
Interface imaging process for high resolution and high aspect ratio patterning

Woo, Seung A.; Park, Ji Young; Kim, Su Min; Kim, Jin-Baek, EUROPEAN POLYMER JOURNAL, v.49, no.6, pp.1707 - 1713, 2013-06

3
Thermodynamic and Kinetic Tuning of Block Copolymer Based on Random Copolymerization for High-Quality Sub-6 nm Pattern Formation

Hur, Yoon Hyung; Song, Seung Won; Kim, Jong Min; Park, Woon Ik; Kim, Kwang Ho; Kim, Yong Joo; Jung, Yeon Sik, ADVANCED FUNCTIONAL MATERIALS, v.28, no.28, 2018-07

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