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Electro-Thermally Actuated Non-Volatile Mechanical Memory With CMOS-Level Operation Voltage and Low Contact Resistance Choi, Pan Kyu; Lee, Yong-Bok; Kim, Suhyun; Kim, Tae-Soo; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.31, no.1, pp.87 - 96, 2022-02 |
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